9032890050
- Automatic regulating or controlling instruments and apparatus
- Other instruments and apparatus
- Other
- Gas panel for regulating and controlling of the gas flow rate, working with plasma technology, comprising - an electronic mass flow regulator, suitable for receiving and sending of analogue and digital signals - four pressure transducers, - two or more pressure valves, - electric interfaces and - several connectors for gas lines - suitable for in-situ plasma bonding processes or for multi frequency bond activating processes